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Conference Proceedings

1. Scanning and rotating micromirrors using thermal actuators

Butler,J.T. ; Bright,V.M. ; Reid,J.R.

Pub. info.:	Optical scanning systems: design and applications : 30-31 July, 1997, San Diego, California. pp.134-144, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3131

Conference Proceedings

2. Extension of high-density interconnect multichip module technology for MEMS packaging

Butler,J.T. ; Bright,V.M. ; Saia,R.J. ; Comtois,J.H

Pub. info.:	Micromachined Devices and Components III. pp.169-177, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224

Conference Proceedings

3. SPICE modeling of polysilicon thermal actuators

Butler,J.T. ; Bright,V.M. ; Cowan,W.D.

Pub. info.:	Micromachined Devices and Components III. pp.284-293, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3224