1.

Conference Proceedings
Conference Proceedings
1. Run By Run Advanced Process Control of Metal Sputter Deposition
Smith, T.H. ; Boning, D.S. ; Stefani, J. ; Butler, S.W.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.11-18,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings
Conference Proceedings
2. * Will Thermal Budget Really Matter in the Future?
Mercer, D.E. ; Jain, A. ; Butler, S.W.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.247-260,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
3.

Conference Proceedings
Conference Proceedings
3. On-Line Inference of Plasma Etch Uniformity Using In Situ Ellipsometry
Stefani, J. ; Butler, S.W. ; Barna, G. ; Henck, S.A.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.23-34,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
4.

Conference Proceedings
Conference Proceedings
4. Sensor Information from a Lam 9600 Metal Etch Process
Barna, G.G. ; Buck, D.W. ; Butler, S.W. ; Splichal, M. ; Anderson, H. ; White, D.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.306-326,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2
5.

Conference Proceedings
Conference Proceedings
5. Methodology for Robust and Sensitive Fault Detection
White, D. ; Barna, G.G. ; Butler, S.W. ; Wise, B. ; Gallagher, N.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.55-63,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
6.

Technical Paper
Technical Paper
6. An Assessment Methodology for Data-Driven and Model-Based Techniques for Engine Health Monitoring.
Butler, S.W. ; Pattipati, K.R. ; Volponi, A. ; Hull, J. ; Rajamani, R.
Pub. info.: A.S.M.E. paper.  2006.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 2006