1.

Conference Proceedings
Conference Proceedings
1. New solutions to realize complex optical systems by a combination of diffractive and refractive optical components (Invited Paper)
Brunner, R. ; Steiner, R. ; Dobschal, H.-J. ; Martin, D. ; Burkhardt, M. ; Helgert, M.
Pub. info.: Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA.  pp.47-55,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5183
2.

Conference Proceedings
Conference Proceedings
2. Novel 3D FDTD Subgrid Scheme for Enhanced Antenna Analysis
Chavannes, N. ; Burkhardt, M. ; Kuster, N.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
3.

Conference Proceedings
Conference Proceedings
3. FDTD Simulations of Antennas Embedded in Complex Environments
Christ, A. ; Chavannes, N. ; Burkhardt, M. ; Regli, P. ; Kuster, N.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
4.

Conference Proceedings
Conference Proceedings
4. Design of a microscopy illumination using a partial coherent light source [5962-50]
Wald, M. ; Burkhardt, M. ; Pesch, A. ; Gross, H. ; Greif, J.
Pub. info.: Optical Design and Engineering II.  pp.59621G-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5962
5.

Conference Proceedings
Conference Proceedings
5. Image fidelity improvement through optical proximity correction and its limits
Burkhardt, M. ; Seong, N.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1184-1193,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
6.

Conference Proceedings
Conference Proceedings
6. Ex vivo and in vivo topographic studies of bladder by optical coherence tomography(Invited Paper)
Daniltchenko, D. ; Sachs, M. D. ; Lankenau, E. ; Koenig, F. ; Burkhardt, M. ; Huettmann, G. ; Kristiansen, G. ; Schnorr, D. ; Al-Shukri, S. ; Loening, S. A.
Pub. info.: Saratov Fall Meeting 2004: Optical Technologies in Biophysics and Medicine VI.  pp.209-214,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5771
7.

Conference Proceedings
Conference Proceedings
7. Coherence management for microlens laser beam homogenizers
Erdmnann, L. ; Burkhardt, M. ; Brunner, R.
Pub. info.: Modeling and Characterization of Light Sources.  pp.145-154,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4775
8.

Conference Proceedings
Conference Proceedings
8. Through-pitch correction of scattering effects in 193-nm alternating phase-shift masks
Burkhardt, M. ; Gordon, R.L. ; Hibbs, M.S. ; Brunner, T.A.
Pub. info.: Optical Microlithography XV.  Part One  pp.348-358,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
9.

Conference Proceedings
Conference Proceedings
9. Impact of resist blur on MEF, OPC, and CD control
Brunner, T.A. ; Fonseca, C. ; Seong, N. ; Burkhardt, M.
Pub. info.: Optical Microlithography XVII.  pp.141-149,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
10.

Conference Proceedings
Conference Proceedings
10. BEOL lithography for early development at the 65-nm node
DellaGuardia, R. ; Kwong, R.W. ; Li, W. ; Lawson, P. ; Burkhardt, M. ; Grauer, I.C. ; Wu, Q. ; Angyal, M. ; Hichri, H. ; Melville, I. ; Kumar, K. ; Lin, Y. ; Holmes, S.J. ; Varanasi, R. ; Spooner, T. ; McHerron, D.
Pub. info.: Optical Microlithography XVII.  pp.980-987,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377