1.

Conference Proceedings

Conference Proceedings
Horstmann, M. ; Greenlaw, D. ; Huebler, P. ; Stephan, R. ; Feudel, Th. ; Wei, A. ; Frohberg, K. ; Hoentschel, J. ; Javorka, P. ; Burbach, G. ; Schwan, C. ; Peters, C. ; Lenski, M ; Press, P. ; Kammler, Th. ; Bierstedt, H. ; Otterbach, R. ; Neu, A. ; Wieczorek, K. ; Schaller, M. ; Salz, H. ; Hohage, J. ; Ruelke, H. ; Klais, J. ; Grasshoff, G. ; Ehrichs, E. ; Goad, S. ; Raab, M. ; Kepler, N.
Pub. info.: Silicon-on-insulator technology and devices XII : proceedings of the international symposium.  pp.57-68,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-03
2.

Conference Proceedings

Conference Proceedings
Greenlaw, D. ; Burbach, G. ; Feudel, T. ; Feustel, F. ; Frohberg, K. ; Graetsch, F. ; Grasshoff, G. ; Hartig, C. ; Hempel, K. ; Horstmann, M. ; Huebler, P. ; Kirsch, R. ; Kruegel, S. ; Langer, E. ; Pawlowitsch, A.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.42-46,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
3.

Conference Proceedings

Conference Proceedings
Romero, K. A. ; Seltmann, R. ; Burbach, G. ; Stephan, R. ; Paufler, J. ; Greenlaw, D.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156