CMOS Compatible Silicon Micromachining Using TMAH

CMOS Compatible Silicon Micromachining Using TMAH

Author(s):

Publication title:

Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-27

Pub. Year:

1995

Page(from):

272

Page(to):

279

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771238 [1566771234]

Language:

English

Call no.:

E23400/961024

Type:

Conference Proceedings

Details

TDL ID:	ZA00013831
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 188th
Conf. info. (Venue):	Chicago, IL, USA
Conf. info. (Date):	1995.10.08-1995.10.13

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