1.

Conference Proceedings
Conference Proceedings
1. 3-D Atomistic Simulations of Submicron Device Fabrication
Bunea, Marius M. ; Dunham, Scott T.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.3-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
2.

Conference Proceedings
Conference Proceedings
2. Lattice Monte Carlo Simulations of Vacancy-Mediated Diffusion and Aggregation Using Ab Initio Parameters
Bunea, Marius M. ; Dunham, Scott T.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.353-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469