1.

Conference Proceedings

Conference Proceedings
Ulyashin, A. G. ; Bumay, Yu. A. ; Fahrner, W. R. ; Ivanov, A. I. ; Job, R. ; Palmetshofer, L.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.95-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
2.

Conference Proceedings

Conference Proceedings
Job, R. ; Borchert, D. ; Bumay, Yu. A. ; Fahrner, W. R. ; Grabosch, G. ; Khorunzhii, I. A. ; Ulyashin, A. G.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.101-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469