Ulyashin, A. G. ; Bumay, Yu. A. ; Fahrner, W. R. ; Ivanov, A. I. ; Job, R. ; Palmetshofer, L.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.95-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Job, R. ; Borchert, D. ; Bumay, Yu. A. ; Fahrner, W. R. ; Grabosch, G. ; Khorunzhii, I. A. ; Ulyashin, A. G.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.101-, 1997. Pittsburg, Pa.. MRS - Materials Research Society