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You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
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1.
Conference Proceedings
Conference Proceedings
1.
Modeling Inductively Coupled Plasma Tools with Chlorine Chemistry
Bukowski, J.D. ; Stewart, R. A. ; Graves, D.B. ; Vitello, P.
Pub. info.:
Proceedings of the tenth symposium on plasma processing
. pp.87-96, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-20
2.
Conference Proceedings
Conference Proceedings
2.
Modeling of Pulsed-Power Inductively Coupled Plasma Reactors
Bukowski, J.D. ; Stewart, R.A. ; Graves, D.B. ; Vitello, P.
Pub. info.:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
. pp.564-574, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2
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Author: Bukowski, J.D.
Language
English
(2)
Publication Year
1990-1999
(2)
Type
Conference Proceedings
(2)
Author
Graves, D.B.
(2)
Vitello, P.
(2)
Stewart, R. A.
(1)
Stewart, R.A.
(1)
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