Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.696-703, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Agache, V. ; Legrand, B. ; Collard, D. ; Buchaillot, L.
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Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.601-612, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Bernardoni, P. ; Riwan, A. ; Tsitsiris, H. ; Millet, O. ; Buchaillot, L. ; Regnier, S. ; Bidaud, P.
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Smart structures and materials 2004 : modeling, signal processing, and control : 15-18 March 2004, San Diego, California, USA. pp.469-477, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering