1.

Conference Proceedings

Conference Proceedings
Yang, M. ; Leiterer, J. ; Gatto, A. ; Kaiser, N. ; Hollein, I. ; Teuber, S. ; Bubke, K.
Pub. info.: Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany.  pp.59651L-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5965
2.

Conference Proceedings

Conference Proceedings
Bubke, K. ; Alles, B ; Cotte, E. ; Sczyrba, M. ; Pierrat, C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.628318-628318,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
3.

Conference Proceedings

Conference Proceedings
Sczyrba, M. ; Kahle, R. ; Bubke, K. ; Pforr, R. ; Neubauer, R.
Pub. info.: Optical Microlithography XIX.  pp.615448-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings

Conference Proceedings
Bubke, K. ; Sczyrba, M. ; Pierrat, C
Pub. info.: Optical Microlithography XIX.  pp.615449-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
5.

Conference Proceedings

Conference Proceedings
Park, K. T. ; Sczyrba, M. ; Bubke, K. ; Pforr, R.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.722-730,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
6.

Conference Proceedings

Conference Proceedings
Cotte, E. ; Selle, M. ; Bubke, K. ; Teuber, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.10-19,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
7.

Conference Proceedings

Conference Proceedings
Chovino, C. ; Helbig, S. ; Dieckmann, W. ; Bubke, K. ; Dress, P.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59923F-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
8.

Conference Proceedings

Conference Proceedings
Durr, A. C. ; Bubke, K. ; Sczyrba, M. ; Angonin, S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922Y-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
9.

Conference Proceedings

Conference Proceedings
Bubke, K. ; Sczyrba, M. ; Park, K. T. ; Neubauer, R. ; Pforr, R. ; Reichelt, J. ; Ziebold, R.
Pub. info.: Photomask Technology 2006.  pp.634913-634914,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
10.

Conference Proceedings

Conference Proceedings
Hollein, I. ; Teuber, S. ; Bubke, K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.194-201,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853