Blank Cover Image

13 High-k Gate Stack Engineering - towards Meeting Low Standby Power and High Performance Targets

Author(s):
De Gendt, S.
Brunco, D.
Caymax, M.
Canard, T.
Date, L.
Delabie, A.
Deweerd, W.
Groeseneken, G.
Houssa, M.
Hyun, S.
Kaushik, V.
Kubicek, S.
Maes, J.
Pantisano, L.
Ragnarsson, L.
Rohr, E.
Schram, T.
Shimamoto, Y.
Sleeckx, E.
Vandervorst, W.
Van Elshocht, S.
Yamamoto, K.
Witters, T.
Zhao, C.
Zimmerman, P.
Heyns, M. (Invited Paper)
21 more
Publication title:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-05
Pub. Year:
2005
Page(from):
109
Page(to):
117
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774635 [1566774632]
Language:
English
Call no.:
E23400/200505
Type:
Conference Proceedings

Similar Items:

A. Debbie, M. Caymax, S. Brijs, D. Brunco, T. Conard, E. Sleeckx, L. Ragnarsson, S. Van Elshocht, S. De Gendt, M. Heyns

Electrochemical Society

T. Conard, T. Schram, A. Akheyar, K. Arstila, G. Zschaetzsch, V. Paraschiv, W. Vandervorst, B. Brijs, S. De Gendt, Z. …

Electrochemical Society

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society

Elshocht, S. Van, Carter, R., Caymax, M., Claes, M., Conard, T., Date, L., Gendt, S. De, Kaushik, V., Kerber, A., Kluth, …

Materials Research Society

Kaushik, V., De Gendt, S., Caymax, M., Young, E., Rohr, E., Van Elshocht, S., Delabie, A., Claes, M., Shi, X., Chen, I., …

Electrochemical Society

Kaushik, V.S., Gendt, S.De, Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., Cartier, …

Materials Research Society

De Gendt, S., Beckx, S., Caymax, M., Claes, M., Conard, T., Delabie, A., Deweerd, W., Hellin, D., Kraus, H., Onsia, B., …

Electrochemical Society

Kaushik, V. S., DeGendt, S., Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., …

Materials Research Society

Pantisano, Ll., Ragnarsson, L. -A., Houssa, M., Degraeve, R., Groeseneken, G., Schram, T., Degendt, S., Heyns, M., …

Springer

De Jaeger, M. Meuris B., Kubicek, S., Verheyena, P., Van Steenbergen, J., Lujan, G., Kunnen, E., Sleeckx, E., Teerlinck, …

Electrochemical Society

Pantisano, L., Afanas'ev, V., Ragnarsson, L-A., Houssa, M., Degraeve, R., Groeseneken, G., Schram, T., DeGendt, S., …

Electrochemical Society

Claes, Martine, Gendt, Stefan De, Witters, Thomas, Kaushik, Vidya, Chen, Jerry, Conard, Thierry, Delabie, Annelies, …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12