1.

Conference Proceedings

Conference Proceedings
Hogan, J. ; Chatila, A.R. ; Bruggeman, B. ; Boksha, V.V.
Pub. info.: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.1-26,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5043
2.

Conference Proceedings

Conference Proceedings
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.21-38,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756