Hogan, J. ; Chatila, A.R. ; Bruggeman, B. ; Boksha, V.V.
Pub. info.:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.1-26, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.21-38, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering