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13 results

Conference Proceedings

1. 244-nm imaging interferometric lithography test bed [6154-95]

Smolev, S. ; Biswas, A. ; Frauenglass, A. ; Brueck, S. R. J.

Pub. info.:	Optical Microlithography XIX. pp.61542K-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

2. Simulation of dense contact hole (K1=O.35) arrays with 193-nm immersion lithography [6154-106]

Raub, A. K. ; Biswas, A. M ; Borodovsky, Y. ; Allen, G. ; Brueck, S. R. J.

Pub. info.:	Optical Microlithography XIX. pp.61542U-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

3. POST-DEPOSITION PATTERNING OF LASER DEPOSITED YBa2Cu3O7-δ FILMS

Dye, R. C. ; Folltyn, S. ; Martin, J. A. ; Nogar, N. S. ; Estler, R. C ; Muenchausean, R. E. ; Mukherjee, A. ; Brueck, S. R. J. ; Carim,. A. H.

Pub. info.:	Laser ablation for materials synthesis : symposium held April 19-20, 1990, San Francisco, California, U.S.A.. pp.193-198, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	191

Conference Proceedings

4. Integrated biomedical nanosensor using guided resonance in photonic crystal structures [6095-24]

Levi, O. ; Suh, W. ; Lee, M. M. ; Zhang, J. ; Brueck, S. R. J. ; Fan, S. ; Harris, J. S.

Pub. info.:	Nanobiophotonics and biomedical applications III : 23-24 January 2006, San Jose, California, USA. pp.60950N-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6095

Conference Proceedings

5. ELECTROMAGNETICALLY-INDUCED SURFACE MICROSTRUCTURES AND ENHANCED FIELD EFFECTS IN LASER PROCESSING

Brueck, S. R. J. ; Ehrlich, D. J. ; Murphy, D. V. ; Tsao, J. Y.

Pub. info.:	Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.295-300, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	29

Conference Proceedings

6. LASER-INDUCED FLUORESCENCE DIAGNOSTICS OF CF4/O2/H2 PLASMA ETCHING

Pang, S. ; Brueck, S. R. J. ; Johnston Jr., W. D.

Pub. info.:	Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.161-168, 1983. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	17

Conference Proceedings

7. *OPTICAL MICROANALYSIS OF SMALL SEMICONDUCTOR STRUCTURES

Murphy, D. V. ; Brueck, S. R. J.

Pub. info.:	Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.81-94, 1983. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	17

Conference Proceedings

8. Sub-Feature Speckle Interferometry: A New Approach to Temperature Measurement

Burckel, D. ; Zaidi, S. H. ; Brueck, S. R. J.

Pub. info.:	Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.125-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	387

Conference Proceedings

9. SCALABLE FABRICATION AND OPTICAL CHARACTERIZATION OF nm Si STRUCTURES

Zaidi, Saleem H. ; Chu, An-Shyang ; Brueck, S. R. J.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.957-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	358

10.

Conference Proceedings

10. APPLICATIONS OF NONLINEAR OPTICAL THIN FILMS

Brueck, S. R. J. ; Myers, R. A.

Pub. info.:	Epitaxial oxide thin films and heterostructures : symposium held April 5-7, 1994, San Francisco, California, U.S.A.. pp.243-, 1994. Pittsburgh, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	341

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