1.

Conference Proceedings

Conference Proceedings
Brozek,T. ; Roberts,D. ; Dao,T.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.101-108,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215
2.

Conference Proceedings

Conference Proceedings
Viswanathan,C.R. ; Rao,V.Ramgopal ; Brozek,T.
Pub. info.: Physics of - Semiconductor Devices -.  Part 2  pp.980-985,  1998.  New Delhi.  Narosa Publishing House
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3316
3.

Conference Proceedings

Conference Proceedings
Brozek,T. ; Norton,C.
Pub. info.: Process Control and Diagnostics.  4182  pp.66-71,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182