1.

Conference Proceedings
Conference Proceedings
1. Plasma Processing Induced Boron Deactivation in Silicon Substrates and Correlation with Plasma Charging Damage
Brozek, T.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.22-28,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
2.

Conference Proceedings
Conference Proceedings
2. Generation of Hole Traps in Silicon Dioxide Under Fowler-Nordheim Stress
Brozek, T. ; Chan, Y. D. ; Viswanathan, C. R.
Pub. info.: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.317-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 428
3.

Conference Proceedings
Conference Proceedings
3. The Effect of Carbon in Silicon on Oxidation Kinetics and Silicon Dioxide Integrity
Ridley, R.S. ; Brozek, T. ; Ruzyllo, J.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.436-443,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5