1.

Conference Proceedings

Conference Proceedings
Subramanian,R. ; Brown,S.E. ; Chen,S.H. ; Morales,C. ; Gallardo,E. ; Singh,B.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.178-186,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings

Conference Proceedings
Lowell,J.K. ; Ackmann,P.W. ; Brown,S.E. ; Sherry,J. ; Hossain,T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.206-216,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
3.

Conference Proceedings

Conference Proceedings
Ackmann,P.W. ; Brown,S.E. ; Edwards,R. ; Downey,D. ; Michael,M. ; Turnquest,K. ; Nistler,J.L.
Pub. info.: Optical Microlithography X.  pp.384-390,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
4.

Conference Proceedings

Conference Proceedings
Ackmann,P.W. ; Brown,S.E. ; Nistler,J.L. ; Spence,C.A.
Pub. info.: Optical Microlithography X.  pp.146-153,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
5.

Conference Proceedings

Conference Proceedings
Brown,S.E.
Pub. info.: Enabling technology for simulation science IV : 25-27 April, 2000, Orlando, USA.  pp.132-140,  2000.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4026