1.

Conference Proceedings
Conference Proceedings
1. Prospective technology for system-on-a-chip: N2 implant followed by VHP O2 reoxidation
Luo,T.Y. ; Al-Shareef,H.N. ; Brown,G.A. ; Watt,V.H.C. ; Karamcheti,A. ; Jackson,M.D. ; Huff,H.R. ; Evans,B. ; Lee,C.H. ; Luan,H.F. ; Kwong,D.L.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.271-280,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
2.

Conference Proceedings
Conference Proceedings
2. Correlation between the reliability of ultrathin ISSG SiO2 and hydrogen content
Luo,T.Y. ; Al-Shareef,H.N. ; Brown,G.A. ; Laughery,M. ; Watt,V.H.C. ; Karamcheti,A. ; Jackson,M.D. ; Huff,H.R.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.220-231,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
3.

Conference Proceedings
Conference Proceedings
3. Remote plasma nitrided oxides for ultrathin gate dielectric applications (Invited Paper)
Hattangady,S.V. ; Grider,O.T. ; Kraft,R. ; Shiau,W.-T. ; Douglas,M.A. ; Nicollian,P. ; Rodder,M. ; Brown,G.A. ; Chatterjee,A. ; Hu,J.C. ; Aur,A. ; Tsai,H.-L. ; Chapman,R.A. ; Eklund,R.H. ; Chen,I.C. ; Pas,M.F.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.30-40,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506