Cram, S. ; Brown, H. ; Spinks, G. ; Hourdet, D. ; Creton, C.
Pub. info.:
Smart materials III : 13-15 December 2004, Sydney, Australia. pp.153-162, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.69-79, 2000. Pennington, N.J.. Electrochemical Society