1.

Conference Proceedings

Conference Proceedings
Brida,S. ; Ferrario,L. ; Giacomozzi,F. ; Giusti,D. ; Guarnieri,V. ; Margesin,B. ; Pignatel,G.U. ; Soncini,G. ; Vasiliev,A.N. ; Verzellesi,G. ; Zen,M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.964-968,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings

Conference Proceedings
Brida,S. ; Ferrario,L. ; Guarnieri,V. ; Giacomozzi,F. ; Margesin,B. ; Paranjape,M. ; Verzellesi,G. ; Zen,M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.969-976,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings

Conference Proceedings
Sarro,P.M. ; Brida,S. ; Vlist,W.van der
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.242-250,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879