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Conference Proceedings

1. *LASER PROBES AND NUMERICAL MODELING AS PROCESS DIAGNOSTICS IN CHEMICAL VAPOR DEPOSITION

Breiland, William G. ; Ho, Pauline ; Coltrin, Michael E, ; Kee, Robert J. ; Evans, Greg H.

Pub. info.:	Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A.. pp.23-34, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	117

Conference Proceedings

2. DIRECT MEASUREMENT OF THE REACTIVITY OF NH AND OH ON A SILICON NITRIDE SURFACE

Buss, R. J. ; Ho, P. ; Fisher, E. R. ; Breiland, William G.

Pub. info.:	Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.51-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	334

Conference Proceedings

3. THEORETICAL ANALYSIS OF A ROTATING-DISK CHEMICAL VAPOR DEPOSITION REACTOR

Coltrin, Michael E. ; Breiland, William G. ; Evans, Gregory H. ; Kee, Robert J.

Pub. info.:	AIChE SPRING MEETING, HOUSTON, TX - MARCH 29-APRIL 2, 1987. 1987. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE meeting [papers]
Ser. no.:	1987

Conference Proceedings

4. GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE

Coltrin, Michael E. ; Breiland, William G. ; Ho, Pauline

Pub. info.:	Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.3-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	334