1.

Conference Proceedings
Conference Proceedings
1. LASER-EXCITED FLOURESCENCE DETECTION OF Si2 DURING SILANE CVD
Breiland, W. G. ; Coltrin, M. E. ; Ho, P.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.225-230,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
2.

Conference Proceedings
Conference Proceedings
2. SPECTRAL REFLECTANCE AS AN IN SITU MONITOR FOR MOCVD
Breiland, W. G. ; Killeen, K. P.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.99-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324