Kashkoush, I. ; Brause, E. ; Grant, R. ; Novak, R.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.168-175, 1997. Pennington, NJ. Electrochemical Society
Kashkoush, I. ; Matthews, R. ; Novak, R. ; Brause, E. ; Carrillo, F. ; Rajaram, B.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.173-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society