High-power low cost drive laser for LPP source [6151-137]
- Author(s):
Fomenkov, I V. ( Cymer, Inc. (USA) ) Hanssaon, B. A. M. ( Cymer, Inc. (USA) ) Boering, N. R. ( Cymer,Inc. (USA) ) Ershov, A. I. ( Cymer,Inc. (USA) ) Partlo, W. N. ( Cymer, Inc. (USA) ) Fleurov, V. B. ( Cymer, Inc. (USA) ) Khodykin, O. V. ( Cymer, Inc. (USA) ) Bykanov, A. N. ( Cymer, Inc. (USA) ) Rettig, C. L. ( Cymer,Inc. (USA) ) Hoffman,J.R. ( Cymer, Inc. (USA) ) Vargas, E. ( Cymer, Inc. (USA) ) Chavez,L,J.A. ( Cymer,Inc. (USA) ) Marx,W.F. ( Cymer, Inc. (USA) ) Brant, D. C. ( Cymer, Inc. (USA) ) - Publication title:
- Emerging Lithographic Technologies X
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6151
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61513X
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461940 [0819461946]
- Language:
- English
- Call no.:
- P63600/6151
- Type:
- Conference Proceedings
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