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11 results

Conference Proceedings

1. Determination of mechanical material properties of piezoelectric ZnO films

Koller,S. ; Ziebart,V. ; Paul,O. ; Brand,O. ; Baltes,H. ; Sarro,P.M. ; Vellekoop,M.J.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.102-109, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

2. CMOS MEMS technology and CAD:the case of thermal microtransducers

Baltes,H. ; Brand,O. ; Paul,O.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.2-13, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

3. Batch-Fabricated Microjet Coolers for Electronic Components

Lagorce,L.K. ; Kercher,D. ; English,J. ; Brand,O. ; Glezer,A. ; Allen,M.G.

Pub. info.:	Proceedings : 1997 International Symposium on Microelectronics : 14-16 October 1997, Pennsylvania Convention Center Philadelphia, Pennsylvania. pp.494-499, 1997. Reston, VA. IMAPS
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3235

Conference Proceedings

4. CMOS chemical microsensors based on resonant cantilever beams

Lange.D ; Koll,A. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.233-243, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

5. Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds

Koll,A. ; Kawahito,S. ; Mayer,F. ; Hagleitner,C. ; Scheiwller,D. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California. pp.223-232, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3328

Conference Proceedings

6. CMOS-based chemical microsensors:components of a micro nose system

Hierlemann,A. ; Koll,A. ; Lange,D. ; Hagleitner,C. ; Kerness,N. ; Brand,O. ; Baltes,H.

Pub. info.:	Chemical microsensors and applications II : 19-20 September 1999, Boston, Massachusetts. pp.158-169, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3857

Conference Proceedings

7. CMOS integrated microsystems and nanosystems

Baltes,H. ; Brand,O.

Pub. info.:	Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.2-10, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3673

Conference Proceedings

8. Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating

Koll,A. ; Kummer,A. ; Brand,O. ; Baltes,H.

Pub. info.:	Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California. pp.308-317, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3673

Conference Proceedings

9. Micromachined sensor for in-situ monitoring of wafer state in plasma etching

Baker,M.D. ; Brand,O. ; Allen,M.G. ; May,G.S.

Pub. info.:	Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II. pp.98-106, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2876

10.

Conference Proceedings

10. CMOS resonant sensors (Invited Paper)

Brand,O. ; Hornung,M. ; Lange,D. ; Baltes,H.

Pub. info.:	Micromachined Devices and Components IV. pp.238-250, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

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