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On the mechanism of the Smart CutTM layer transfer in relaxed SiGe

Author(s):
Nguyen, P.
Aulnette, C.
Guiot, E.
Daval, N.
Bourdelle K.K.
Cayrefourcq, I.
Deguet, C.
Sartori, S.
Tauzin, A.
Lagahe-Blanchard, C.
Soubie, A.
6 more
Publication title:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-03
Pub. Year:
2005
Page(from):
185
Page(to):
190
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774611 [1566774616]
Language:
English
Call no.:
E23400/200503
Type:
Conference Proceedings

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