1.

Conference Proceedings
Conference Proceedings
1. OPTIMISATION OF THE HETEROEPITAXY OF Ge ON GaAs FOR MINORITY-CARRIER LIFETIME
Venkatasubramanian, R. ; Timmons, M. L. ; Bothra, S. ; Borrego, J. M.
Pub. info.: Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.253-258,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 198
2.

Conference Proceedings
Conference Proceedings
2. Process Considerations in the Integration of HDP-CVD Films
Annapragada, R. ; Bothra, S.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.256-261,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
3.

Conference Proceedings
Conference Proceedings
3. Plasma Treatment to Improve Adhesion of Low-k Materials
Annapragada, R. ; Tafari, T. ; Bothra, S.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.303-309,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
4.

Conference Proceedings
Conference Proceedings
4. Low-k Integration Issues for 0.18 um Devices
Annapragada, R. ; Bothra, S.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.178-184,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
5.

Conference Proceedings
Conference Proceedings
5. INTERFACE RECOMBINATION VELOCITIES IN LAYERED GaAs AND AlGaAs/GaAs STRUCTURES GROWN BY OMVPE
Bothra, S. ; Venkatasubramanian, R. ; Gandhi, S. K. ; Borrego, J. M.
Pub. info.: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.183-186,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 102
6.

Conference Proceedings
Conference Proceedings
6. Optimizing Sputtered TiN Arc Film Properties for Lithography of Sub-0.25 ｦﾌm Interconnect
Sengupta, S. S. ; Baker, D. ; Sethi, S. ; Bothra, S.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.539-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
7.

Conference Proceedings
Conference Proceedings
7. Analysis of Copper and Low-K Dielectric Interconnect System for 0.18-ｦﾌm Technology
Lin, X. W. ; Hui, K. ; Chanderhari, K. ; Bothra, S. ; Pramanik, D. ; Findley, P.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.399-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
8.

Conference Proceedings
Conference Proceedings
8. Prevention of Charging Damage to Gate Oxide During Intermetal Oxide Deposition by HDP CVD
Bothra, S. ; Gabriel, C.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.311-317,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
9.

Conference Proceedings
Conference Proceedings
9. Dielectric CMP Planarization Considerations for Deep Sub-Micron Multilevel Interconnect Processes
Weling, M. ; Bothra, S. ; Qian, L. ; Sethi, S. ; Pramanik, D.
Pub. info.: Proceedings of the First International Symposium on Chemical Mechanical Planarization.  pp.197-205,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-22