1.

Conference Proceedings
Conference Proceedings
1. Characterization of interfacial layers and surface roughness using spectroscopic reflectance, spectroscopic ellipsometry, and atomic force microscopy
Hoobler, R.J. ; Korlahalli, R. ; Boltich, E. ; Serafin, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.756-764,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings
Conference Proceedings
2. Sensitivity of the silicon layer thickness in SOI process in the UV regime
Shivaprasad, D. ; Boltich, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.776-782,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689