Laser-driven plasma CVD of thin films
- Author(s):
Konov,V.I. ( General Physics Institute ) Prokhorov,A.M. Uglov,S.A. Bolshakov,A.P. Leontiev,I.A. Dausinger,F. Hugel,H. Angstenberger,B. Sepold,G. Metev,S. - Publication title:
- Lasers in Synthesis, Characterization, and Processing of Diamond
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3484
- Pub. Year:
- 1997
- Page(from):
- 2
- Page(to):
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429421 [0819429422]
- Language:
- English
- Call no.:
- P63600/3484
- Type:
- Conference Proceedings
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