1.

Conference Proceedings
Conference Proceedings
1. GDS-3 initiative: advanced design-through-chip infrastructure for subwavelength technology
Pack, R.C. ; Heins, M.D. ; Chatila, A.R. ; Boksha, V.V. ; Cottrell, D. ; Berglund, C.N. ; Hogan, J. ; James, F. ; Vucurevich, T. ; Bales, M. ; Shimasaki, K.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.566-584,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Silicon economics (Invited Paper)
Hogan, J. ; Chatila, A.R. ; Bruggeman, B. ; Boksha, V.V.
Pub. info.: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.1-26,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5043
3.

Conference Proceedings
Conference Proceedings
3. Applications of image diagnostics to metrology quality assurance and process control
Allgair, J.A. ; Boksha, V.V. ; Bunday, B.D. ; Diebold, A.C. ; Cole, D.C. ; Davidson, M.P. ; Hutcheson, J.D. ; Gurnell, A.W. ; Joy, D.C. ; McIntosh, J.M. ; Muckenhirn, S.G. ; Pellegrini, J.C. ; Larrabee, R.D. ; Potzick, J.E. ; Vlada, A.E. ; Smith, N.P. ; Starikov, A. ; Sulivan, N.T. ; Wells, O.C.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.251-277,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
4.

Conference Proceedings
Conference Proceedings
4. Physical and timing verification of subwavelength-scale designs: I. Lithography impact on MOSFETs
Pack, R.C. ; Axelrad, V. ; Shibkov, A. ; Boksha, V.V. ; Huckabay, J.A. ; Salik, R. ; Staud, W. ; Wang, R. ; Grobman, W.D.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.51-62,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042