1.

Conference Proceedings

Conference Proceedings
Kim,H.-G. ; Kim,M.-S. ; Bok,C.-K. ; Park,B.-J. ; Kim,J.-W. ; Baik,K.-H. ; Lee,D.-H.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.554-561,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
2.

Conference Proceedings

Conference Proceedings
Park,J.-H. ; Seo,D.-C. ; Kim,K.-D. ; Park,S.-Y. ; Kim,S.-J. ; Lee,H. ; Jung,J.-C. ; Bok,C.-K. ; Baik,K.-H.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.454-462,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
3.

Conference Proceedings

Conference Proceedings
Bok,C.-K. ; Koh,C.-W. ; Jung,M.-H. ; Baik,K.-H. ; Kim,J.-B. ; Cheong,J.-H.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.501-511,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
4.

Conference Proceedings

Conference Proceedings
Park,J.-H. ; Kim,S.-J. ; Park,S.-Y. ; Lee,H. ; Jung,J.-C. ; Bok,C.-K. ; Baik,K.-H.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.485-491,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
5.

Conference Proceedings

Conference Proceedings
Kim,S.-K. ; Kim,Y.-S. ; Kim,J.-S. ; Bok,C.-K. ; Ham,Y.-M. ; Baik,K.-H.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.435-442,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
6.

Conference Proceedings

Conference Proceedings
Jung,J.-C. ; Bok,C.-K. ; Baik,K.-H.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.11-25,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
7.

Conference Proceedings

Conference Proceedings
Kim,S.-J. ; Park,J.-H. ; Kim,J.-H. ; Kim,K.-D. ; Lee,H. ; Jung,J.-C. ; Bok,C.-K. ; Baik,K.-H.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.430-436,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
8.

Conference Proceedings

Conference Proceedings
Chun,J.-S. ; Bok,C.-K. ; Baik,K.-H.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.92-99,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
9.

Conference Proceedings

Conference Proceedings
Kim,S.-K. ; Hong,J.-G. ; Park,J.-O. ; Yoo,T.-J. ; Hyun,Y.-S. ; Bok,C.-K. ; Shin,K.-S.
Pub. info.: Optical Microlithography XIV.  4346  pp.214-221,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
10.

Conference Proceedings

Conference Proceedings
Eom,T.-S. ; Hyun,Y.-S. ; Kim,C.-K. ; Bok,C.-K. ; Shin,K.-S.
Pub. info.: Optical Microlithography XIV.  4346  pp.869-878,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346