1.

Conference Proceedings
Conference Proceedings
1. Resolution enhanced top anti-reflective coating materials for ArF immersion lithography [6153-74]
Jung, J C ; Lee, S K ; Ban, K D ; Bok C ; Kim H S ; Moon, S C ; Kim, J
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
2.

Conference Proceedings
Conference Proceedings
2. Development of multi-function hard mask to simplify process step [6153-108]
Lee, K. ; Kim, S. ; Lee, G. ; Lee, S. ; Cho J ; Kim W ; Bok C ; Kim H ; Moon S ; Kim J
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61532V-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153