1.
Conference Proceedings |
1. Resolution enhanced top anti-reflective coating materials for ArF immersion lithography [6153-74]
Jung, J C ; Lee, S K ; Ban, K D ; Bok C ; Kim H S ; Moon, S C ; Kim, J
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2.
Conference Proceedings |
Lee, K. ; Kim, S. ; Lee, G. ; Lee, S. ; Cho J ; Kim W ; Bok C ; Kim H ; Moon S ; Kim J
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