1.

Conference Proceedings
Conference Proceedings
1. Sidewall structure estimation from CD-SEM for lithographic process control
Bingham, P.R. ; Price, J.R. ; Tobin, K.W., Jr. ; Karnowski, T.P. ; Bennett, M.H. ; Bogardus, E.H. ; Bishop, M.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.115-126,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
2.

Conference Proceedings
Conference Proceedings
2. CD reference materials for sub-10th μm applications
Cresswell, M.W. ; Bogardus, E.H. ; de Pinillos, J.V.M. ; Bennett, M.H. ; Allen, R.A. ; Guthrie, W.F. ; Murabito, C.E. ; am Ende, B.A. ; Linholm, L.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.116-127,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689