1.

Conference Proceedings
Conference Proceedings
1. Crystallographic Texture Characterization of Inlaid Copper Interconnects
Zienert, Inka ; Besser, Paul ; Blum, Werner ; Zschech, Ehrenfried
Pub. info.: Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 672
2.

Conference Proceedings
Conference Proceedings
2. Integration Challenges For Advanced Salicide Processes And Their Impact On CMOS Device Performance
Wieczorek, Karsten ; Horstmann, Manfred ; Engelmann, Hans-Jtrgen ; Dittmar, Kornelia ; Blum, Werner ; Sultan, Akif ; Besser, Paul R. ; Frenkel, Austin
Pub. info.: Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A..  pp.C5.1-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 611