1.

Conference Proceedings
Conference Proceedings
1. Out-of-plane rotary micromirrors for reconfigurable photonic applications
Dagel, D.J. ; Blum Spahn, O. ; Allen, J.J. ; Kemme, S.A. ; Grossetete, G.D. ; Gass, F. R.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.114-121,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
2.

Conference Proceedings
Conference Proceedings
2. Optical system properties of a reconfigurable MEMS interconnect
Kemme, S.A. ; Blum Spahn, O. ; Gass, F. R. ; Dagel, D. J. ; Grossetete, G.D.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.94-101,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
3.

Conference Proceedings
Conference Proceedings
3. Stress and curvature in MEMS mirrors
Gass, F. R. ; Dagel, D. J. ; Adams, D.P. ; Grossetete, G.D. ; Blum Spahn, O. ; Kemme, S.A. ; Mani, S.S. ; Malloy, K.J.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.87-93,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983