1.

Conference Proceedings
Conference Proceedings
1. PLASMA SURFACE INTERACTION DURING THE GROWTH OF SEMICONDUCTOR THIN FILMS STUDIED BY IN SITU INFRARED ELLIPSOMETRY
Blayo, N. ; Drevillon, B.
Pub. info.: Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.631-636,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 237
2.

Conference Proceedings
Conference Proceedings
2. New Applications of Ellipsometry for Materials Characterization and VLSI Device Process Control
Blayo, N. ; Grevoz, A. ; Lee, J.T.C. ; Ibbotson, D.E.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.207-216,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33