Ntsoenzok, E. ; Desgardin, P. ; Blondiaux, G. ; Schmidt, D. C. ; Barbot, J. F. ; Blanchard, C. ; Renault, P. O.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.395-, 1997. Pittsburg, Pa.. MRS - Materials Research Society