Scaling self-aligned contacts for 0.25ヲフ m and below
- Author(s):
Perera,A. ( Motorola ) Pfiester,J.R. ( Hewlett-Packard Co. ) Lii,T. ( Motorola ) Feng,C. ( Semiconductor Technology Lab. ) Bhat,M. ( Motorola ) Dao,T. ( Semiconductor Technology Lab. ) Molloy,J. ( Semiconductor Technology Lab. ) Blackwell,M. ( Motorola ) J. Cecil, ( Motorola ) - Publication title:
- Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3212
- Pub. Year:
- 1997
- Page(from):
- 171
- Page(to):
- 175
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426444 [081942644X]
- Language:
- English
- Call no.:
- P63600/3212
- Type:
- Conference Proceedings
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