1.

Conference Proceedings
Conference Proceedings
1. Characterization of 193-nm resists for optical mask manufacturing
Fosshaug, H. ; Paulsson, A. ; Berzinsh, U. ; Magnusson, H.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.1256-1267,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. Operation of spatial light modulators in DUV light
Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.277-284,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
3.

Conference Proceedings
Conference Proceedings
3. Operation of spatial light modulators in DUV light
Dauderstaedt, U. ; Duerr, P. ; Krellmann, M. ; Karlin, T. ; Berzinsh, U. ; Leonardsson, L. ; Wendrock, H.
Pub. info.: MOEMS Display and Imaging Systems.  pp.222-229,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4985