Binns, M.J. ; Bertolini, S. ; Wise, R. ; Myers, D.J. ; McKenna, T.A.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.647-657, 2002. Pennington, NJ. Electrochemical Society
Borionetti, G. ; Falster, R. ; Bertolini, S. ; Cornara, M. ; Olmo, M. ; Chalmers, G. ; Childs, R. ; Marcuccilli, G.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.196-203, 1997. Pennington, NJ. Electrochemical Society
Binns, M.J. ; Bertolini, S. ; Wise, R. ; Myers, D.J. ; McKenna, T.A.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.647-657, 2002. Pennington, NJ. Electrochemical Society