Roman, P. ; Tsai, C.-L. ; Hengstebeck, R. ; Pantano, C. ; Berry, J. ; Kamieniecki, E. ; Ruzyllo, J.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.145-149, 1999. Pennington, NJ. Electrochemical Society
A collection of technical papers : AIAA Space 2001 Conference & Exposition, Albuquerque, New Mexico, 28-30 August 2001. v. 2 pp.1168-1176, 2001. Reston, VA. American Institute of Aeronautics and Astronautics