1.

Conference Proceedings
Conference Proceedings
1. Temperature-Dependent Studies of a-SiC:H Growth by Remote Plasma CVD Using Methylsilanes
Lee, Moon-Sook ; Lal, Pratik ; Bent, Stacey F.
Pub. info.: Chemical aspects of electronic ceramics processing : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A..  pp.153-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 495
2.

Conference Proceedings
Conference Proceedings
2. Controlling Area-Selective Atomic Layer Deposition of HfO2 Dielectric by Self-Assembled Monolayers
Chen, Rong ; Kim, Hyoungsub ; McIntyre, Paul C. ; Bent, Stacey F.
Pub. info.: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.57-62,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 811
3.

Conference Proceedings
Conference Proceedings
3. The Study of Modified Layers in SiCOH Dielectrics Using Spectroscopic Ellipsometry
Worsley, Marcus A. ; Bent, Stacey F. ; Gates, Stephen M. ; Kumar, Kaushik ; Dalton, Timothy ; Hedrick, Jeffrey C.
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.235-240,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766
4.

Conference Proceedings
Conference Proceedings
4. Hot Wire Chemical Vapor Deposition as a Novel Synthetic Method for Electroactive Organic Thin Films
Zaharias, Gillian A. ; Shi, Helen H. ; Bent, Stacey F.
Pub. info.: Flexible electronics 2004 -- materials and device technology : symposium held April 13-16, 2004, San Francisco, California, U.S.A.  pp.361-368,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 814
5.

Conference Proceedings
Conference Proceedings
5. Effect of Filament Material on the Decomposition of SiH4 in Hot Wire CVD of Si-Based Films
Duan, H. L. ; Zaharias, G.A. ; Bent, Stacey F.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.21-30,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715
6.

Conference Proceedings
Conference Proceedings
6. Identification of Growth Precursors In Hot Wire CVD of Amorphous Silicon Films
Duan, H.L. ; Zaharias, G.A. ; Bent, Stacey F.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 664