1.

Conference Proceedings
Conference Proceedings
1. New sensor for real-time trench depth monitoring in micromachining applications
Amary,P. ; Benferhat,R. ; Liddane,K.J. ; Ostrovsky,A.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.205-217,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. Optical characterization methods of InP-based micro-opto-electro-mechanical systems
Dantec,R.Le ; Benyattou,T. ; Guillot,G. ; Seassal,C. ; Leclercq,J.-L. ; Letartre,X. ; Gagnaire,A. ; Gendry,M. ; Viktorovitch,P. ; Benferhat,R. ; Rondi,D. ; Blondeau,R.R.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.258-264,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
3.

Conference Proceedings
Conference Proceedings
3. New optical sensor for real-time in-situ endpoint monitoring during dry etching of III-V ternary multistack layers
Liddane,K.J. ; Benferhat,R. ; Lee,J. ; Westerman,R. ; Johnson,D.J. ; Donohue,J.F. ; Sasserath,J.N. ; Pearton,S.J.
Pub. info.: Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California.  pp.300-308,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3882