1.

Conference Proceedings
Conference Proceedings
1. FORMATION OF WELL-SEPARATED BURIED AND SURFACE NICKEL-SILICIDE LAYERS IN A SINGLE ION IMPLANTATION STEP
Wu, M.F. ; De Wachter, J. ; Hendrickx, P. ; Pattyn, H. ; Van Bavel, A.M. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Maenhoudt, M. ; Bruynseraede, Y.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.899-904,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. Experimental Verification of a Random Medium Model for the Optical Behavior of Ultrathin Crystalline Silicon Layers Grown on Porous Silicon
Abouelsaood, A. A. ; Bender, H. ; Caymax, N. ; Ghannam, M. Y. ; Nijs, J. ; Poortmans, J. ; Stalmans, L.
Pub. info.: Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A..  pp.207-212,  1999.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 557
3.

Conference Proceedings
Conference Proceedings
3. WITH WAFERS WITH NITROGEN DOPED SUBSTRATES AND THEIR GETTERING BEHAVIOR
Sebmolke, R. ; Blietz, M. ; Hoelzl, R. ; Menzel, D. ; Bender, H.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.658-669,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
4.

Conference Proceedings
Conference Proceedings
4. HYDROGEN PASSIVATION OF HF-LAST CLEANED (100) SILICON SURFACES: A MIR-FTIR STUDY
Bender, H. ; Verhaverbeke, S. ; Heyns, M.M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.186-194,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
5.

Conference Proceedings
Conference Proceedings
5. Power scale-up of the extreme-ultraviolet electric capillary discharge source
Fornaciari, N.R. ; Bender, H. ; Buchenauer, D. ; Dimkoff, J.L. ; Kanouff, M.P. ; Karim, S. ; Romeo, C. ; Shimkaveg, G.M. ; Silfvast, W.T. ; Stewart, K.D.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.110-121,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
6.

Conference Proceedings
Conference Proceedings
6. IN SITU AND REAL TIME STUDIES OF WET CHEMICAL SILICON SURFACE CLEANING REACTIONS
Schmidt, H.F. ; Teerlinck, I. ; Storm, W. ; Bender, H. ; Heyns, M.M.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.480-491,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
7.

Conference Proceedings
Conference Proceedings
7. Electron Microscopic Studies of Co- and Ti-Germanosilicide Films Formed on SiGe Layers
Jin, S. ; Donaton, R. A. ; Bender, H. ; Maex, K.
Pub. info.: Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A..  pp.133-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 523
8.

Conference Proceedings
Conference Proceedings
8. Stress in Silicon Due to the Formation of Self Aligned Poly-CoSi2 Lines Studied by Micro-Raman Spectroscopy
Howard, D. J. ; Wolf, I. De ; Bender, H. ; Maex, K.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.251-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
9.

Conference Proceedings
Conference Proceedings
9. Structure and magnetic properties of Fe-N thin films grown by ECR deposition
Nemeth, S. ; Akinaga, H. ; Boeve, H. ; Bender, H. ; Boeck, J. de ; Borghs, G.
Pub. info.: Advanced hard and soft magnetic materials : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.611-,  1999.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 577
10.

Conference Proceedings
Conference Proceedings
10. ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON
Wu, M. F. ; Wachter, J. De ; Bavel, A.-M. Van ; Pattyn, H. ; Langouche, G. ; Vanhellemont, J. ; Bender, H. ; Temst, K. ; Wuyts, B. ; Bruynseraede, Y.
Pub. info.: Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.159-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 320