1.

Conference Proceedings

Conference Proceedings
Augendre, E. ; Perello, C. ; Vandamme, E.P. ; Pochet, S. ; Rooyackers, R. ; Beckx, S. ; De Potter, M. ; Lauwers, A. ; Badenes, G.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.297-304,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Kubicek, S. ; Van Elshocht, S. ; Delabie, A. ; Yamamoto, K. ; Beckx, S. ; Claes, M. ; Van Hoornick, N. ; Kwak, D.-H. ; Hyun, S. ; Rothschild, A. ; Veloso, A. ; Anil, K. ; Lujan, G. ; Kittle, J.A. ; Lauwers, A. ; Kaushik, V. ; Niwa, M. ; De Gendt, S. ; Heyns, M. ; Jurczak, M. ; Biesemans, S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.169-192,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
3.

Conference Proceedings

Conference Proceedings
Bogaerts, W. ; Wiaux, V. ; Dumon, P. ; Taillaert, D. ; Wouters, J. ; Beckx, S. ; Campenhout, J.V. ; Luyssaert, B. ; Thourhout, D.V. ; Baets, R.
Pub. info.: Nano- and micro-optics for information systems : 3-4 August 2003, San Diego, California, USA.  pp.101-112,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5225
4.

Conference Proceedings

Conference Proceedings
De Gendt, S. ; Beckx, S. ; Caymax, M. ; Claes, M. ; Conard, T. ; Delabie, A. ; Deweerd, W. ; Hellin, D. ; Kraus, H. ; Onsia, B. ; Parishev, V. ; Puurunen, R. ; Rohr, E. ; Snow, J. ; Tsai, W. ; Van Doome, P. ; Van Elshocht, S. ; Vertommen, J. ; Witters, T. ; Heyns, M.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.67-77,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
5.

Conference Proceedings

Conference Proceedings
De Vos, J. ; Haspeslagh, L. ; Demand, M. ; Redolfi, A. ; Baerts, C. ; Beckx, S. ; Vleugels, F. ; Van Houdt, J.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.306-315,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
6.

Conference Proceedings

Conference Proceedings
Bogoerts, W. ; Dumon, P. ; Jaenen, P. ; Wouters, J. ; Beckx, S. ; Wiaux, V. ; Van Thourhout, D. ; Tailaert, D. ; Luyssaert, B. ; Baets, R.
Pub. info.: Integrated Optics: Theory and Applications.  pp.59560R-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5956
7.

Conference Proceedings

Conference Proceedings
Ronse, K.G. ; Bisschop, P.D. ; Eliat, A. ; Goethals, A.M. ; Hermans, J. ; Jonckheere, R. ; Heuvel, D.V.D. ; Roey, F.V. ; Beckx, S. ; Wouters, J.M. ; Marneffe, J.F. ; O'Neil, T. ; Tirri, B. ; Sewell, H.
Pub. info.: Optical Microlithography XVI.  Part One  pp.640-649,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
8.

Conference Proceedings

Conference Proceedings
Dumon, P. ; Bogaerts, W. ; Van Campenhout, J. ; Wiaux, V. ; Wouters, J.M. ; Beckx, S. ; Baets, R.G.
Pub. info.: Photonic Crystal Materials and Nanostructures.  pp.360-368,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5450
9.

Conference Proceedings

Conference Proceedings
Van Steenwinckel, D. ; Kwinten, H. ; Locorotondo, S. ; Beckx, S.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.215-225,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376