1.

Conference Proceedings

Conference Proceedings
Becker, G. ; Ross, M. F. ; Wong, S. S. ; Minter, J. P. ; Marlowe, T. ; Livesay, W. R.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.1126-1135,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings

Conference Proceedings
Dolny, G. ; Ipri, A.C. ; Hsueh, F-L. ; Stewart, R.G. ; Atherton, J. ; Cuomo, F. ; Jose, D. ; Spitzer, M. ; Batty, D-P. VuM. ; Khormaei, R. ; Keyser, T. ; Becker, G. ; Tilton, M. ; Rhoades, R. ; Ellis, R. ; Franklin, H. ; Helgeson, M.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.426-433,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
3.

Technical Paper

Technical Paper
Knaus, K. ; Haberlein, J. ; Becker, G. ; Rosskamp, H.
Pub. info.: 2004 Small Engine Technology Conference and Exhibition : SAE technical paper.  2004.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2004