Lavallee, E. ; Beauvais, J. ; Mangoua, T. B. ; Drouin, D.
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EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany. pp.62810O-, 2006. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chicoine, M. ; Francois, A. ; Tavares, C. ; Chevobbe, S. ; Schiettekatte, F. ; Aimez, V. ; Beauvais, J. ; Beerens, J.
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Applications of photonic technology 6 : closing the gap between theory, development, and application : Photonics North 2003. pp.423-431, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Morris, D. ; Perret, N. ; Riabinina, D.A. ; Beerens, J. ; Aimez, V. ; Beauvais, J. ; Fafard, S.
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Applications of photonic technology 5 : closing the gap between theory, development, and application : Photonics North 2002. pp.705-710, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Salem, B. ; Morris, D. ; Aimez, V. ; Beerens, J. ; Beauvais, J. ; Houde, D.
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Terahertz and gigahertz electronics and photonics IV : 23-25 January 2005, San Jose, California, USA. pp.193-199, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Cloutier, M. ; Awad, Y. ; Lavallee, E. ; Turcotte, D. ; Beauvais, J. ; Drouin, D. ; Mun, L.K. ; Yang, P. ; Lafrance, P. ; Legario, R. ; Yoshida, A. ; Nozue, H.
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Emerging Lithographic Technologies VIII. pp.521-528, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Legario, R.R. ; Kelkar, P.S. ; Beauvais, J. ; Lavallee, E. ; Drouin, D. ; Cloutier, M. ; Turcotte, D. ; Yang, P. ; Mun, L.K. ; Awad, Y. ; Lafrance, P.J.
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Advances in Resist Technology and Processing XXI. pp.903-914, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering