1.

Conference Proceedings
Conference Proceedings
1. Hyperthermal Nitridation for Ultrathin Silicon Oxynitride Gate Dielectrics
Krug, C. ; Baumvol, I.J.R. ; Stedile, F.C. ; Green, M.L. ; Klemens, F. ; Silverman, P.J. ; Sorsch, T.W. ; Alvarez, F. ; Hammer, P. ; Victoria, N.M.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.187-198,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
2.

Conference Proceedings
Conference Proceedings
2. Compositional and Electrical Differences of SiO2/SiC and SiO2/Si Structures Upon Thermal Annealing in N2O and NO
Stedile, F.C. ; Radtke, C. ; Baumvol, I.J.R. ; Boudinov, H. ; McDonald, K. ; Huang, M.B. ; Weller, R.A. ; Feldman, L.C. ; Williams, J.R.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.169-180,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
3.

Conference Proceedings
Conference Proceedings
3. Dynamics of Thermal Growth of Silicon Oxide Films on Si
Almeida, R.M.C. de ; Goncalves, S. ; Baumvol, I.J.R. ; Stedile, F.C.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.57-66,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
4.

Conference Proceedings
Conference Proceedings
4. Thermally Driven Atomic Transport in Silicon Oxynitride and High-k Films on Silicon
Baumvol, I.J.R. ; Stedile, F.C. ; Morais, J. ; Krug, C. ; Radtke, C. ; da, Rosa ; E.B.O ; Bastos, K.P. ; Pezzi, R.P. ; Miotti, L. ; Soares, G.V.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.106-118,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
5.

Conference Proceedings
Conference Proceedings
5. Atomic Transport During Thermal Nitridation of SiO2 Films in NH3 and During Subsequent Thermal Reoxidation
Baumvol, I.J.R. ; Breelle, E. ; Stedile, F.C. ; Ganem, J.-J. ; Trimaille, I. ; Rigo, S.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.97-108,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
6.

Conference Proceedings
Conference Proceedings
6. Mechanisms of Thermal Growth of Very Thin Films of SiO2 on Si(OO1) in Dry O2
Trimaille, I. ; Stedile, F.C. ; Ghanem, J.-J. ; Baumvol, I.J.R. ; Rigo, S.
Pub. info.: The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface.  pp.59-71,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-1
7.

Conference Proceedings
Conference Proceedings
7. Physical Characterization of Ultrathin Films of High Dielectric Constant Materials on Silicon
Gusev, E.P. ; Copel, M. ; Cartier, E. ; Buchanan, D. ; Okorn-Schmidt, H. ; Cribelyuk, M.A. ; Falcon, D. ; Murphy, R. ; Molis, S. ; Baumvol, I.J.R. ; Krug, C. ; Jussila, M. ; Tuominen, M. ; Haukka, S.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.477-486,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2