1.

Conference Proceedings

Conference Proceedings
Klemens, F.P. ; Baumann, F.H. ; Kornblit, A. ; Layadi, N. ; Lee, H. ; Maynard, H.L. ; Mytych, J.M. ; Sorch, T.W. ; Tennant, D.M. ; Timp, G.L. ; Lee, J.T.C.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.85-95,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
2.

Conference Proceedings

Conference Proceedings
Hergenrother, J.M. ; Oh, S.H. ; Nigam, T. ; Monroe, D. ; Klemens, F.P. ; Kornblit, A. ; Baumann, F.H. ; Grazul, J.L. ; Johnson, R.W. ; King, C.A. ; Kleiman, R.N.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.381-392,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
3.

Conference Proceedings

Conference Proceedings
Lee, J.T.C. ; Colonell, J.J. ; Klemens, F.P. ; Baumann, F.H. ; Kornblitt, A. ; Lee, H. ; Maynard, H.L. ; Sorsch, T.W. ; Timp, G.L. ; Layadi, N. ; Malyshev, M.V. ; Donnelly, V.M. ; Ciampa, N.A.
Pub. info.: Proceedings of the twelfth International Symposium on Plasma Processing.  pp.1-12,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-4
4.

Conference Proceedings

Conference Proceedings
Suhlivan, P.O. ; Baumann, F.H. ; Gilzner, O.H.
Pub. info.: Proceedings of the Fifth International Symposium of Process Physics and Modeling in Semiconductor Technology.  pp.220-223,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-2
5.

Conference Proceedings

Conference Proceedings
Mastrapasqua, M. ; Esseni, D. ; Celler, G.K. ; Baumann, F.H. ; Fiegna, C. ; Selmi, L. ; Sangiorgi, E.
Pub. info.: Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium.  pp.97-102,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-3
6.

Conference Proceedings

Conference Proceedings
Stuart, H.R. ; Baumann, F.H. ; Wong-Foy, A.
Pub. info.: Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA.  pp.137-144,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5347