1.

Conference Proceedings
Conference Proceedings
1. Correlation Between Defects, Leakage Currents and Conduction Mechanisms in Thin High-k Dielectric Layers
Paskaleva, A. ; Atanassova, E. ; Lemberger, M. ; Bauer, A. J.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.411-423,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Annealing of Aluminum Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing
Rambach, M. ; Bauer, A. J. ; Frey, L. ; Friedrichs, P. ; Ryssel, H.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.621-624,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485
3.

Conference Proceedings
Conference Proceedings
3. Integrated Vapor Phase Cleaning and Pure NO Nitridation for Gate Stack Formation
Glowacki, F. ; Froeschle, B. ; Deutschmann, L. ; Sagnes, I. ; Laviale, D. ; Bensahel, D. ; Halimaoui, A. ; Martin, F. ; Bauer, A. J.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.229-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
4.

Conference Proceedings
Conference Proceedings
4. Wafer scale characterization of interface state densities without test structures by photocurrent analysis
Rommel, M. ; Graft, M. ; Frey, L. ; Bauer, A. J. ; Ryssel, H.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France.  pp.113-122,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-10
5.

Conference Proceedings
Conference Proceedings
5. High-k hafnium silicate films on silicon and germanium wafers by MOCVD using single-source precursor
Lemberger, M. ; Schon, F. ; Dirnecker, T. ; Jank, M. P. M. ; Pakaleva, A. ; Bauer, A. J. ; Frey, L. ; Ryssel, H.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.873-880,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09