1.

Conference Proceedings
Conference Proceedings
1. CONTROL OF POLYSILICON EMITTER BIPOLAR TRANSISTOR CHARACTERISTICS BY RAPID THERMAL OR FURNACE ANNEAL OF THE POLYSILICON/SILICON INTERFACE
Bhattacharya, S. ; Lobo, M. ; Jung, L. ; Banerjee, S. ; Reuss, R. ; Batra, S. ; Park, K. ; Hu, G.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.721-726,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings
Conference Proceedings
2. The Integration of Shallow Trench Isolation (STI) for High Density DRAM with 0.18 μm Technology and Beyond
Pan, P. ; McQueen, M. ; Robinson, K. ; Sharan, S. ; Batra, S. ; Lane, R. ; Somerville, L. ; Tran, L.C.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.213-222,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
3.

Conference Proceedings
Conference Proceedings
3. Study of Polysilicon TFTs for High Density SRAM Applications
Zaman, R.J. ; Batra, S. ; Manning, M. ; Banerjee, S.
Pub. info.: Proceedings of the Third Symposium on Thin Film Transistor Technologies.  pp.342-351,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-23
4.

Conference Proceedings
Conference Proceedings
4. Characterization of Polysilicon Thin-Film Transistor Gate Dielectrics
Zaman, R.J. ; Damiano, J., Jr. ; Batra, S. ; Manning, M. ; Banerjee, S.K.
Pub. info.: Proceedings of the Third Symposium on Thin Film Transistor Technologies.  pp.104-122,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-23
5.

Conference Proceedings
Conference Proceedings
5. COMPARATIVE STUDIES OF FURNACE AND RAPID THERMAL PASSIVATION FOR ACCUMULATION AND INVERSION MODE POLYSILICON-ON-OXIDE MOSFETS
Batra, S. ; Park, K. ; Banerjee, S. ; Sundaresan, R.
Pub. info.: Polysilicon thin films and interfaces.  pp.393-398,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
6.

Conference Proceedings
Conference Proceedings
6. DIFFUSION OF AS AND B IN POLYSILICON/SINGLE CRYSTAL SILICON SYSTEMS
Park, K. ; Batra, S. ; Banerjee, S. ; Lux, G. ; Manukonda, R.
Pub. info.: Polysilicon thin films and interfaces.  pp.141-146,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
7.

Conference Proceedings
Conference Proceedings
7. COMPARISON OF AMORPHOUS AND POLYCRYSTALLINE SILICON FILMS AS A SOLID DIFFUSION SOURCE FOR ADVANCED VLSI PROCESSES
Park, K. ; Batra, S. ; Banerjee, S. ; Lux, G.
Pub. info.: Polysilicon thin films and interfaces.  pp.159-166,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
8.

Conference Proceedings
Conference Proceedings
8. LATERAL UNIFORMITY OF ULTRA-SHALLOW JUNCTIONS FORMED BY RAPID THERMAL ANNEALING IN POLYSILICON-ON-SILICON SYSTEMS
Batra, S. ; Park, K. ; Banerjee, S. ; Smith, T. ; Mulvaney, B.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.329-334,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
9.

Conference Proceedings
Conference Proceedings
9. EFFECTS OF ARSENIC SEGREGATION AND ELECTRON TRAPPING ON THE CAPACITANCE-VOLTAGE BEHAVIOR OF POLYSILICON AND POLYCIDE GATES
Lin, J. ; Batra, S. ; Park, K. ; Banerjee, S. ; Sun, S. ; Yeargain, J. ; Lux, G.
Pub. info.: Polysilicon thin films and interfaces.  pp.195-200,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
10.

Conference Proceedings
Conference Proceedings
10. SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING
Batra, S. ; Park, K. ; Lobo, M. ; Banerjee, S.
Pub. info.: Phase transformation kinetics in thin films : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A..  pp.201-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 230